Project
# | Title | Team Members | TA | Documents | Sponsor |
---|---|---|---|---|---|
29 | Modular Wafer Track for Semiconductor Fabrication |
Hayden Kunas Jack Schnepel Nathan Pitsenberger |
Shengyan Liu | proposal1.pdf |
|
Modular Wafer Track for Semiconductor Fabrication Team Members: -Jackks2 -nmp5 -hkunas2 # Problem In today’s world, where semiconductors drive nearly every aspect of technological innovation, little room is left for small-scale fabrication and experimentation. Commercial wafer processing equipment ranges from tens of thousands to hundreds of millions of dollars, putting it far out of reach for hobbyists, educational laboratories, and early-stage researchers. Existing systems are not only cost-prohibitive but also lack the flexibility and modularity needed for experimentation on a smaller scale. As a result, innovation outside of large industrial fabs is limited, leaving students, independent researchers, and small labs without access to tools that enable exploration of semiconductor device fabrication. # Solution Our team’s solution to this problem is to design, build, and demonstrate a modular, cost-effective wafer track system that lowers the barrier to entry for small-scale semiconductor processing. The idea is to create a track that will: Transport wafers between the interchangeable processing modules, Execute repeatable fabrication recipes that ensure process consistency, and communicate standardized instructions to each module through a defined packet interface, enabling true modularity and user-created modules. The system architecture will be layered: A Raspberry Pi will serve as the front-end controller, providing recipe management, a user interface, and real-time monitoring. An ESP32 Microcontroller will delegate low-level instructions to each module and control the stepper motors for wafer transport. Individual modules (demonstrated through a wafer alignment station that reorients a wafer’s major flat at the start of each recipe) will showcase the modular framework and mechanical precision of the track. By defining a standardized track-module interface and releasing the system as open source, our design will empower hobbyists, students, and small research labs to reproduce, extend, and customize the platform. This solution not only addresses cost barriers but also promotes accessibility, flexibility, and innovation in semiconductor fabrication education and prototyping. # Solution Components User Interface: This will be the subsystem that the user interfaces with to create a series of steps, or recipes, that will be sent to the ESP32 for execution. This system will be based around a Raspberry PI 4B with an Anyuse 15.6” portable monitor built into the system for the user to interact with. Main mover: This will be the primary subsystem responsible for moving the wafer to the various modules. Components include two linear actuators and a rotational axis to transport the wafer to the modules, limit switches for the linear actuators, and proxy sensors (APDS-9930)to detect when the wafer has reached a certain location. Included with this is a power distribution PCB, which will be used to step down and rectify the wall voltage into the necessary DC voltages required for all of the motors and other components. Wafer Alligner: This module will have a small vacuum to hold the wafer down to a disc while it is spun with a motor. A proxy sensor (APDS-9930) will be able to detect the flat edge which can be aligned in a certain area. A linear actuator will be used here as well to raise and lower the wafer onto this platform. ”Black Box”: This is the subsystem that will act as a symbol of potential future modules that can be added, such as a spin coater or hot plate modules. In our project, this idea will be executed with an Arduino R4. The “black box” should not be considered as part of the project, but only as a showcase for the functions and abilities. # Criterion For Success This project will be labeled as a success if: The track can recognize and adapt to new modules being loaded, Accept user recipes and execute those systematically, Rotate wafers to the correct orientation, Automatically transport wafers to the correct module slot depending on module position |